High conductance low wall deposition upper shield



FIG. 1 is a perspective view showing the top of a shield of the invention;

FIG. 2 is a perspective view showing the bottom of a shield of the invention;

FIG. 3 is a top view;

FIG. 4 is a bottom view;

FIG. 5 is a side perspective view; and,

FIG. 6 is a cross sectional view along line 6--6 of FIG. 3. 

The ornamental design for a high conductance low wall deposition upper shield, as shown and described. 